Atomic Layer Deposition for Semiconductors

Nonfiction, Science & Nature, Technology, Electronics, Semiconductors, Science, Chemistry, Physical & Theoretical
Cover of the book Atomic Layer Deposition for Semiconductors by , Springer US
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Author: ISBN: 9781461480549
Publisher: Springer US Publication: October 18, 2013
Imprint: Springer Language: English
Author:
ISBN: 9781461480549
Publisher: Springer US
Publication: October 18, 2013
Imprint: Springer
Language: English

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

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