Atomic Layer Deposition for Semiconductors
Nonfiction, Science & Nature, Technology, Electronics, Semiconductors, Science, Chemistry, Physical & Theoretical
| Author: | ISBN: | 9781461480549 | |
| Publisher: | Springer US | Publication: | October 18, 2013 |
| Imprint: | Springer | Language: | English |
| Author: | |
| ISBN: | 9781461480549 |
| Publisher: | Springer US |
| Publication: | October 18, 2013 |
| Imprint: | Springer |
| Language: | English |
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
