H Baltes: 1 book
CMOS Cantilever Sensor Systems
Atomic Force Microscopy and Gas Sensing Applications
Language: English
Release Date: April 17, 2013
This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also...
