Fundamental Principles of Engineering Nanometrology

Nonfiction, Science & Nature, Technology, Electronics, Semiconductors, Science, Other Sciences
Cover of the book Fundamental Principles of Engineering Nanometrology by Richard Leach, Elsevier Science
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Author: Richard Leach ISBN: 9781437778328
Publisher: Elsevier Science Publication: September 3, 2009
Imprint: William Andrew Language: English
Author: Richard Leach
ISBN: 9781437778328
Publisher: Elsevier Science
Publication: September 3, 2009
Imprint: William Andrew
Language: English

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

  • Provides a basic introduction to measurement and instruments 
  • Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
  • Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments)
  • Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
  • Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

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