Measurement Technology for Micro-Nanometer Devices
Nonfiction, Science & Nature, Technology, Electronics, Microelectronics
| Author: | Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue | ISBN: | 9781118717998 |
| Publisher: | Wiley | Publication: | October 18, 2016 |
| Imprint: | Wiley | Language: | English |
| Author: | Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue |
| ISBN: | 9781118717998 |
| Publisher: | Wiley |
| Publication: | October 18, 2016 |
| Imprint: | Wiley |
| Language: | English |
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
