Photomodulated Optical Reflectance

A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

Nonfiction, Science & Nature, Technology, Electronics, Semiconductors, Science, Other Sciences, Applied Sciences
Cover of the book Photomodulated Optical Reflectance by Janusz Bogdanowicz, Springer Berlin Heidelberg
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Author: Janusz Bogdanowicz ISBN: 9783642301087
Publisher: Springer Berlin Heidelberg Publication: June 26, 2012
Imprint: Springer Language: English
Author: Janusz Bogdanowicz
ISBN: 9783642301087
Publisher: Springer Berlin Heidelberg
Publication: June 26, 2012
Imprint: Springer
Language: English

One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

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One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

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