Plasma Etching

An Introduction

Nonfiction, Science & Nature, Science, Chemistry, Analytic, Physical & Theoretical
Cover of the book Plasma Etching by , Elsevier Science
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: ISBN: 9780080924465
Publisher: Elsevier Science Publication: September 8, 1989
Imprint: Academic Press Language: English
Author:
ISBN: 9780080924465
Publisher: Elsevier Science
Publication: September 8, 1989
Imprint: Academic Press
Language: English
Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.

More books from Elsevier Science

Cover of the book Cyber-Physical Systems by
Cover of the book Handbook of Adhesion Promoters by
Cover of the book Mobile Security and Privacy by
Cover of the book Molecular Interfacial Phenomena of Polymers and Biopolymers by
Cover of the book Sample Surveys: Design, Methods and Applications by
Cover of the book Microscopic Simulation of Financial Markets by
Cover of the book Finite Physical Dimensions Optimal Thermodynamics 1 by
Cover of the book Advances in Agronomy by
Cover of the book Vehicular Communications and Networks by
Cover of the book Tribology by
Cover of the book G Protein-Coupled Receptors Part A by
Cover of the book Perspectives for Agroecosystem Management: by
Cover of the book Analysis of Complex Disease Association Studies by
Cover of the book Molecular Basis of Memory by
Cover of the book Microgrid by
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy