Plasma Etching

An Introduction

Nonfiction, Science & Nature, Science, Chemistry, Analytic, Physical & Theoretical
Cover of the book Plasma Etching by , Elsevier Science
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Author: ISBN: 9780080924465
Publisher: Elsevier Science Publication: September 8, 1989
Imprint: Academic Press Language: English
Author:
ISBN: 9780080924465
Publisher: Elsevier Science
Publication: September 8, 1989
Imprint: Academic Press
Language: English
Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.

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