Principles of Microelectromechanical Systems

Nonfiction, Science & Nature, Technology, Electronics, Microelectronics
Cover of the book Principles of Microelectromechanical Systems by Ki Bang Lee, Wiley
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: Ki Bang Lee ISBN: 9781118102244
Publisher: Wiley Publication: March 21, 2011
Imprint: Wiley-IEEE Press Language: English
Author: Ki Bang Lee
ISBN: 9781118102244
Publisher: Wiley
Publication: March 21, 2011
Imprint: Wiley-IEEE Press
Language: English

The building blocks of MEMS design through closed-form solutions

Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications.

Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and small-scale worlds. The book then explains microfabrication, which presents knowledge on the common fabrication process to design realistic MEMS. From there, coverage includes:

  • Statics/force and moment acting on mechanical structures in static equilibrium
  • Static behaviors of structures consisting of mechanical elements
  • Dynamic responses of the mechanical structures by the solving of linear as well as nonlinear governing equations
  • Fluid flow in MEMS and the evaluation of damping force acting on the moving structures
  • Basic equations of electromagnetics that govern the electrical behavior of MEMS
  • Combining the MEMS building blocks to form actuators and sensors for a specific purpose

All chapters from first to last use a unified approach in which equations in previous chapters are used in the derivations of closed-form solutions in later chapters. This helps readers to easily understand the problems to be solved and the derived solutions. In addition, theoretical models for the elements and systems in the later chapters are provided, and solutions for the static and dynamic responses are obtained in closed-forms.

This book is designed for senior or graduate students in electrical and mechanical engineering, researchers in MEMS, and engineers from industry. It is ideal for radio frequency/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The closed-form solution approach will also appeal to device designers interested in performing large-scale parametric analysis.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

The building blocks of MEMS design through closed-form solutions

Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications.

Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and small-scale worlds. The book then explains microfabrication, which presents knowledge on the common fabrication process to design realistic MEMS. From there, coverage includes:

All chapters from first to last use a unified approach in which equations in previous chapters are used in the derivations of closed-form solutions in later chapters. This helps readers to easily understand the problems to be solved and the derived solutions. In addition, theoretical models for the elements and systems in the later chapters are provided, and solutions for the static and dynamic responses are obtained in closed-forms.

This book is designed for senior or graduate students in electrical and mechanical engineering, researchers in MEMS, and engineers from industry. It is ideal for radio frequency/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The closed-form solution approach will also appeal to device designers interested in performing large-scale parametric analysis.

More books from Wiley

Cover of the book Investment Performance Measurement by Ki Bang Lee
Cover of the book Essential Tools for Organisational Performance by Ki Bang Lee
Cover of the book 9 Millionen Fahrräder am Rande des Universums Obskures aus Forschung und Wissenschaft by Ki Bang Lee
Cover of the book The BRC Global Standard for Food Safety by Ki Bang Lee
Cover of the book A Collection of Surveys on Savings and Wealth Accumulation by Ki Bang Lee
Cover of the book Teaching Outside the Box by Ki Bang Lee
Cover of the book Marketplace Lending, Financial Analysis, and the Future of Credit by Ki Bang Lee
Cover of the book Market Trading Tactics by Ki Bang Lee
Cover of the book The Future of Differences by Ki Bang Lee
Cover of the book The Aesthetic Imperative by Ki Bang Lee
Cover of the book Marine Ecosystems by Ki Bang Lee
Cover of the book Smart Grid by Ki Bang Lee
Cover of the book LINQ For Dummies by Ki Bang Lee
Cover of the book Drop the Pink Elephant by Ki Bang Lee
Cover of the book The Family Therapy Progress Notes Planner by Ki Bang Lee
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy