Rapid Thermal Processing

Science and Technology

Nonfiction, Science & Nature, Technology, Material Science, Manufacturing
Cover of the book Rapid Thermal Processing by , Elsevier Science
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Author: ISBN: 9780323139809
Publisher: Elsevier Science Publication: December 2, 2012
Imprint: Academic Press Language: English
Author:
ISBN: 9780323139809
Publisher: Elsevier Science
Publication: December 2, 2012
Imprint: Academic Press
Language: English

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

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