Resonant MEMS

Fundamentals, Implementation, and Application

Nonfiction, Science & Nature, Technology, Electronics, Microelectronics
Cover of the book Resonant MEMS by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink, Wiley
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink ISBN: 9783527676354
Publisher: Wiley Publication: April 22, 2015
Imprint: Wiley-VCH Language: English
Author: Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
ISBN: 9783527676354
Publisher: Wiley
Publication: April 22, 2015
Imprint: Wiley-VCH
Language: English

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

More books from Wiley

Cover of the book Will Big Business Destroy Our Planet? by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Membranen by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book The History of Aquaculture by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Managing Indirect Spend by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Latino Politics by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book BlackBerry Planet by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book The Early Earth by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Perioperative Medicine for the Junior Clinician, Enhanced Edition by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Computational Approaches to Studying the Co-evolution of Networks and Behavior in Social Dilemmas by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Adventures In Raspberry Pi by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Critical Metals Handbook by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book ABC of Asthma by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book The Algebra Teacher's Activity-a-Day, Grades 6-12 by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book The Engagement Equation by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Puppies For Dummies by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy