Resonant MEMS

Fundamentals, Implementation, and Application

Nonfiction, Science & Nature, Technology, Electronics, Microelectronics
Cover of the book Resonant MEMS by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink, Wiley
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Author: Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink ISBN: 9783527676354
Publisher: Wiley Publication: April 22, 2015
Imprint: Wiley-VCH Language: English
Author: Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
ISBN: 9783527676354
Publisher: Wiley
Publication: April 22, 2015
Imprint: Wiley-VCH
Language: English

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

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