Silicon-Molecular Beam Epitaxy

Volume I

Nonfiction, Science & Nature, Technology, Material Science
Cover of the book Silicon-Molecular Beam Epitaxy by E. Kasper, CRC Press
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Author: E. Kasper ISBN: 9781351093514
Publisher: CRC Press Publication: May 4, 2018
Imprint: CRC Press Language: English
Author: E. Kasper
ISBN: 9781351093514
Publisher: CRC Press
Publication: May 4, 2018
Imprint: CRC Press
Language: English

This subject is divided into two volumes. Volume I is on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. Three chapters on homoepitaxy are followed by two chapters describing the different ways in which MBE may be applied to create insulator/Si stackings which may be used for three-dimensional circuits. The two remaining chapters in Volume I are devoted to device applications. The first three chapters of Volume II treat all aspects of heteroepitaxy with the exception of the epitaxial insulator/Si structures already treated in volume I.

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This subject is divided into two volumes. Volume I is on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. Three chapters on homoepitaxy are followed by two chapters describing the different ways in which MBE may be applied to create insulator/Si stackings which may be used for three-dimensional circuits. The two remaining chapters in Volume I are devoted to device applications. The first three chapters of Volume II treat all aspects of heteroepitaxy with the exception of the epitaxial insulator/Si structures already treated in volume I.

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