Silicon Technologies

Ion Implantation and Thermal Treatment

Nonfiction, Science & Nature, Technology, Electronics, Microelectronics
Cover of the book Silicon Technologies by , Wiley
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Author: ISBN: 9781118601143
Publisher: Wiley Publication: May 10, 2013
Imprint: Wiley-ISTE Language: English
Author:
ISBN: 9781118601143
Publisher: Wiley
Publication: May 10, 2013
Imprint: Wiley-ISTE
Language: English

The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

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The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

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