Micro and Nano Fabrication

Tools and Processes

Nonfiction, Science & Nature, Technology, Nanotechnology, Manufacturing
Cover of the book Micro and Nano Fabrication by Hans H. Gatzen, Volker Saile, Jürg Leuthold, Springer Berlin Heidelberg
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Author: Hans H. Gatzen, Volker Saile, Jürg Leuthold ISBN: 9783662443958
Publisher: Springer Berlin Heidelberg Publication: January 2, 2015
Imprint: Springer Language: English
Author: Hans H. Gatzen, Volker Saile, Jürg Leuthold
ISBN: 9783662443958
Publisher: Springer Berlin Heidelberg
Publication: January 2, 2015
Imprint: Springer
Language: English

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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