Microsystem Technology and Microrobotics

Nonfiction, Computers, Advanced Computing, Artificial Intelligence, General Computing, Science & Nature, Technology
Cover of the book Microsystem Technology and Microrobotics by Sergej Fatikow, Ulrich Rembold, Springer Berlin Heidelberg
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Author: Sergej Fatikow, Ulrich Rembold ISBN: 9783662034507
Publisher: Springer Berlin Heidelberg Publication: April 17, 2013
Imprint: Springer Language: English
Author: Sergej Fatikow, Ulrich Rembold
ISBN: 9783662034507
Publisher: Springer Berlin Heidelberg
Publication: April 17, 2013
Imprint: Springer
Language: English

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

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