Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System

Nonfiction, Science & Nature, Science, Other Sciences, Nanostructures, Technology, Nanotechnology
Cover of the book Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System by Seiji Samukawa, Springer Japan
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Author: Seiji Samukawa ISBN: 9784431547952
Publisher: Springer Japan Publication: January 28, 2014
Imprint: Springer Language: English
Author: Seiji Samukawa
ISBN: 9784431547952
Publisher: Springer Japan
Publication: January 28, 2014
Imprint: Springer
Language: English

This book provides for the first time a good understanding of the etching profile technologies that do not disturb the plasma. Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors in the plasma processing and prediction system of real etching profiles based on monitoring data. Readers are made familiar with these sensors, which can measure real plasma process surface conditions such as defect generations due to UV-irradiation, ion flight direction due to charge-up voltage in high-aspect ratio structures and ion sheath conditions at the plasma/surface interface. The plasma etching profile realistically predicted by a computer simulation based on output data from these sensors is described.

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This book provides for the first time a good understanding of the etching profile technologies that do not disturb the plasma. Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors in the plasma processing and prediction system of real etching profiles based on monitoring data. Readers are made familiar with these sensors, which can measure real plasma process surface conditions such as defect generations due to UV-irradiation, ion flight direction due to charge-up voltage in high-aspect ratio structures and ion sheath conditions at the plasma/surface interface. The plasma etching profile realistically predicted by a computer simulation based on output data from these sensors is described.

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